Rietveld refinement of this film failed because commercial XRD analysis total was not able to deconvolute the peaks of Gd 5Si 4 and Gd 5Si 3 phases. Any XRD analysis of phase compositions can have large errors. The peaks of Gd 5Si 4 and Gd 5Si 3 phases are close to each other and difficult to distinguish. The peaks of residual phase of Gd 5Si 3 composition is also shown and indexed. 9.11 shows XRD peaks of Pt-protected thin film of Gd 5Si 4. There is a small shift in the major peak occurring close to 32 degrees. 9.10 shows XRD peaks of thin film of Gd 5Si 2.09Ge 1.91 in brown color and the green peaks represent the peaks from the reference library. This search and match function indicated the presence of other phases, such as Gd 5Si 4 and Gd 5Ge 3 as shown in Table 9.3. X’PERT HIGHSCORE PLUS software was used to identify and match the peaks. X-ray diffraction (XRD) analysis of thin film of Gd 5Si 2.09Ge 1.91 was carried out at room temperature.
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